EQUIPMENT TRAINING

For highly utilized tools in the NanoFab, users can sign-up for regularly scheduled training blocks of time. Tools, training times and trainer information can be found in the table below.

To sign-up for a training block, use the following link: Training Sign-Up

For tools not listed above, you can contact the appropriate trainer via email according to the matrix found here: NanoFab Training Assignments. Staff will then schedule a time with you.

Equipment & DaysTimeSession CapTrainer
Mondays
E-Beam Lithography10:00am-11:30am3 PeopleMilan Begliarbekov
Furnace/RCA/SRD2:30pm-3:30pm5 PeopleShawn Kilpatrick
Stylus & Optical Profilometer10:00am-11:00am5 PeopleShawn or Vishal
Tuesdays
Atomic Layer Deposition10:00am-11:30am5 PeopleMilan Begliarbekov
Mask Aligner/Spinners1:30pm-2:30pm5 PeopleShawn Kilpatrick
Wednesdays
RF/DC Sputter10:00am-11:30am5 PeopleMilan Begliarbekov
Chemical Hoods10:00am-11:00am5 PeopleShawn Kilpatrick
Orientation3:30pm-4:30pm10 PeopleRotating
Vapor HF/XeF2/Plasma Asher2:30pm-3:30pm5 PeopleShawn or Vishal
Thursdays
PECVD1:30pm-2:00pm5 PeopleShawn Kilpatrick
ICP/DRIE (Cl & Fl)10:00am-11:30am5 PeopleVishal Narang
AFM3:00pm-5:00pm3 PeopleVishal Narang
SEM2:00pm-3:30pm3 PeopleShawn Kilpatrick
Fridays
E-Beam Evaporator10:00am-11:30am5 PeopleMilan Begliarbekov