Trainer contact information:

Milan Begliarbekov milan.begliarbekov@asrc.cuny.edu
Shawn Kilpatrick shawn.kilpatrick@asrc.cuny.edu
Vishal Narang vishal.narang@asrc.cuny.edu
Jacob Trevino jacob.trevino@asrc.cuny.edu
EquipmentBadger NameTrainer
Wire BonderWire_Bonder_454647EMilan
HF / Piranha HoodHF_Piranha_HoodShawn
Resist HoodSpinner_Hood-
RCA Cleaning HoodRCA_HoodShawn
Metal  / Caustic Etch HoodCaustic_HoodShawn
Development HoodDeveloper_Hood-
Solvent HoodSolvent_Hood-
Electron Beam LithographyEBL_ElionixMilan
Photo Resist SpinnerPhoto_SpinnerShawn or Jacob
Ebeam Resist SpinnerEBL_SpinnerMilan or Shawn
Non Standard Materials SpinnerOther_SpinnerShawn or Jacob
Mask AlignerMask_Aligner_EVG620Jacob
Photoresist Oven - PrebakePrebake_OvenAnyone
Photoresist Oven - PostbakePostbake_OvenAnyone
3D Lithography System3DLitho_GTJacob
Scanning Electron MicroscopeSEM_NovaNanoMilan
Surface ProfilometerStylus_Prof_DektakMilan
EllipsometerEllipsometer_VVaseVishal
Optical ProfilometerOptical_Prof_GT-IShawn
Thin Film AnalyzerReflectometer_F20Shawn
Inspection Microscope # 1Scope1_Litho-
Inspection Microscope #2Scope2_Metrology-
Inspection Microscope # 3Scope3_Etch-
Thermal EvaporatorThermal_Evap_O3THMilan
Ebeam and Thermal EvaporatorEbeam_Evap_O8EMilan
Sputtering SystemSputter_O8Milan
Sputter CoaterSputter_Coat_108AShawn
Atomic Layer DepositionALD_FijiMilan
UV Ozone CleanerUV_Ozone_UV2Shawn
Plasma AsherPlasma_Asher_ION40Shawn
Xenon Difluoride EtcherXeF2_Etch_E1Shawn
Rapid Thermal AnnealerRTA_600SShawn
Furnace - LPCVD NitrideFurnace_NitrideShawn
Furnace - AnnealFurnace_AnnealShawn
Furnace - Thermal OxideFurnace_Thermal_OxideShawn
Furnace - LPCVD TEOSFurnace_TEOSShawn
Spin Rinse DryerSRD_470SShawn
PECVDPECVD_SYS100Shawn
Chlorine ICP EtcherICP_Cl_SYS100Vishal
Fluorine ICP EtcherICP_Fl_SYS100Vishal
Reactive Ion EtcherRIE_NPG80Vishal
Vapor HF EtcherVaporHF_PrimaxxVishal
Dicing SawDicing_Saw_DAD3220Jacob
Film Frame Wafer MounterTape_Mount_UH114Jacob
UV Curing SystemUV _Curing_ UH102Jacob
Atomic Force MicroscopeAFM_DimensionVishal