Academic, Start-Up and Industry Rates (subject to change)

 

Monthly cap per user: $1,200 – Academic, Start-up – $2,250, Industry $5,000

EquipmentManufacturerBadger NameAcademic Rate ($/hr)Start-Up Rate ($/hr)Industry Rate ($/hr)
Dicing SawDiscoDicing_Saw_DAD32202060100
Film Frame Wafer MounterUltron SystemsTape_Mount_UH114000
UV Curing System Ultron SystemsUV _Curing_ UH102000
Wire Bonder West BondWire_Bonder_454647E103050
Spin Rinse DryerOEM GroupSRD_470S000
HF / Piranha HoodAir ControlHF_Piranha_Hood000
Resist HoodAir ControlSpinner_Hood000
RCA Cleaning HoodAir ControlRCA_Hood000
Metal  / Caustic Etch HoodAir ControlCaustic_Hood000
Development Hood Air ControlDeveloper_Hood000
Solvent HoodAir ControlSolvent_Hood000
Atomic Layer Deposition Ultratech Cambridge NanoTechALD_Fiji2575125
Thermal Evaporator AJA InternationalThermal_Evap_O3TH103050
Ebeam and Thermal EvaporatorAJA InternationalEbeam_Evap_O8E2060100
Sputtering System AJA InternationalSputter_O82060100
PECVDOxford InstrumentsPECVD_SYS1002575125
Sputter Coater Cressington Scientific InstrumentsSputter_Coat_108A2060100
UV Ozone Cleaner SAMCOUV_Ozone_UV2103050
Inspection Microscope # 3Nikon InstrumentsScope3_Etch000
Chlorine ICP EtcherOxford InstrumentsICP_Cl_SYS1002575125
Fluorine ICP EtcherOxford InstrumentsICP_Fl_SYS1003090150
Plasma Asher PVA TePlaPlasma_Asher_ION40154575
Reactive Ion EtcherOxford InstrumentsRIE_NPG802575125
Vapor HF EtcherSPTS TechnologiesVaporHF_Primaxx154575
Xenon Difluoride EtcherSPTS TechnologiesXeF2_Etch_E12575125
Electron Beam Lithography ElionixEBL_Elionix40120200
Photo Resist Spinner Brewer ScientificPhoto_Spinner103050
Ebeam Resist Spinner Brewer ScientificEBL_Spinner103050
Non Standard Materials Spinner Brewer ScientificOther_Spinner103050
Mask AlignerEV GroupMask_Aligner_EVG6202575125
Photoresist Oven - Prebake Thermal Product SolutionsPrebake_Oven000
Photoresist Oven - PostbakeThermal Product SolutionsPostbake_Oven000
3D Lithography SystemNanoscribe3DLitho_GT2575125
Inspection Microscope # 1Nikon InstrumentsScope1_Litho000
Scanning Electron MicroscopeFEISEM_NovaNano2575125
Inspection Microscope #2Nikon InstrumentsScope2_Metrology000
Surface Profilometer BrukerStylus_Prof_Dektak103050
Ellipsometer J.A. WoollamEllipsometer_VVase103050
Atomic Force MicroscopeBrukerAFM_Dimension2060100
Optical ProfilometerBrukerOptical_Prof_GT-I103050
Thin Film Analyzer FilmetricsReflectometer_F20000
Rapid Thermal AnnealerMPTRTA_600S154575
Furnace - LPCVD NitrideTystarFurnace_Nitride40120200
Furnace - LPCVD TEOSTystarFurnace_TEOS35105175
Furnace - AnnealTystarFurnace_Anneal154575
Furnace - Thermal OxideTystarFurnace_Thermal_Oxide103050