Academic, Start-Up and Industry Rates (subject to change)

 

Academic monthly cap per user: $1,300

Non-academic caps available, see NanoFab staff for details

EquipmentManufacturerBadger NameAcademic Rate ($/hr)Start-Up Rate ($/hr)Industry Rate ($/hr)
Dicing SawDiscoDicing_Saw_DAD32202060100
Film Frame Wafer MounterUltron SystemsTape_Mount_UH114000
UV Curing System Ultron SystemsUV _Curing_ UH102000
Wire Bonder West BondWire_Bonder_454647E2060100
Spin Rinse DryerOEM GroupSRD_470S000
HF / Piranha HoodAir ControlHF_Piranha_Hood000
Resist HoodAir ControlSpinner_Hood000
RCA Cleaning HoodAir ControlRCA_Hood000
Metal  / Caustic Etch HoodAir ControlCaustic_Hood000
Development Hood Air ControlDeveloper_Hood000
Solvent HoodAir ControlSolvent_Hood000
Atomic Layer Deposition Ultratech Cambridge NanoTechALD_Fiji2781135
Thermal Evaporator AJA InternationalThermal_Evap_O3TH154575
Ebeam and Thermal EvaporatorAJA InternationalEbeam_Evap_O8E3090150
Sputtering System AJA InternationalSputter_O82575125
PECVDOxford InstrumentsPECVD_SYS10035105175
Sputter Coater Cressington Scientific InstrumentsSputter_Coat_108A2575125
UV Ozone Cleaner SAMCOUV_Ozone_UV2103050
Inspection Microscope # 3Nikon InstrumentsScope3_Etch000
Chlorine ICP EtcherOxford InstrumentsICP_Cl_SYS10035105175
Fluorine ICP EtcherOxford InstrumentsICP_Fl_SYS10035105175
DRIE EtcherOxford InstrumentsDRIE_FL_SYS10040120200
Plasma Asher PVA TePlaPlasma_Asher_ION40154575
Reactive Ion EtcherOxford InstrumentsRIE_NPG803090150
Vapor HF EtcherSPTS TechnologiesVaporHF_Primaxx154575
Xenon Difluoride EtcherSPTS TechnologiesXeF2_Etch_E12575125
Electron Beam Lithography ElionixEBL_Elionix50150250
Photo Resist Spinner Brewer ScientificPhoto_Spinner154575
Ebeam Resist Spinner Brewer ScientificEBL_Spinner154575
Non Standard Materials Spinner Brewer ScientificOther_Spinner154575
Mask AlignerEV GroupMask_Aligner_EVG6202575125
Photoresist Oven - Prebake Thermal Product SolutionsPrebake_Oven000
Photoresist Oven - PostbakeThermal Product SolutionsPostbake_Oven000
3D Lithography SystemNanoscribe3DLitho_GT35105175
Inspection Microscope # 1Nikon InstrumentsScope1_Litho000
Scanning Electron MicroscopeFEISEM_NovaNano2575125
Inspection Microscope #2Nikon InstrumentsScope2_Metrology000
Surface Profilometer BrukerStylus_Prof_Dektak154575
Ellipsometer J.A. WoollamEllipsometer_VVase154575
Atomic Force MicroscopeBrukerAFM_Dimension2575125
Optical ProfilometerBrukerOptical_Prof_GT-I154575
Thin Film AnalyzerFilmetricsReflectometer_F20000
Rapid Thermal AnnealerMPTRTA_600S154575
Furnace - LPCVD NitrideTystarFurnace_Nitride45135225
Furnace - LPCVD TEOSTystarFurnace_TEOS45135225
Furnace - AnnealTystarFurnace_Anneal154575
Furnace - Thermal OxideTystarFurnace_Thermal_Oxide2575125

Additional Items

Item Cost Unit
SU-8 Developer $13.13 500 ml
Remover PG $16.88 500 ml
Trionic Gloves $2.06 Pair
Gold E-Beam Evaporation $0.65 1 nm