EQUIPMENT TYPE
Spin Rinse Dryer
MANUFACTURER
OEM
MODEL
470S
LOCATION
Plasma Bay
PROCESSES
Rinse and dry 4″ and 6″ wafers
Spin Rinse Dryer
OEM
470S
Plasma Bay
Rinse and dry 4″ and 6″ wafers
The spin rinse dryer offers a fast way to clean and dry wafers in patches up to 25 wafers at a time.