EQUIPMENT TYPE

Vapor HF Etcher

MANUFACTURER

SPTS

MODEL

Primaxx

LOCATION

Plasma Bay

PROCESSES

Isotropic etching of all types of SiO2

The SPTS Primaxx Vapor HF Etcher is used primarily for isotropic etching of all types of SiOand offers a safer alternative to liquid- HF processes. Furthermore, the dry-HF process eliminates the stiction problems often encountered in releasing SOI-MEMS devices.