AJA International Orion 8E Evaporator

Equipment Type

E-beam & Thermal Evaporation System

Manufacturer

AJA International

Model

Orion-8E

Location

Deposition Bay

Processes

Metals: Au, Al, Cr, Ti, Ge, Cu, Pt

The AJA Orion 8E Evaporator System is capable of both electron beam (e-beam) and thermal evaporation. The system is configured with 2 thermal evaporation sources and 6 crucibles (15cc) for e-beam evaporation with automated indexing.  The two thermal sources can be independently swung to a center position prior to deposition. The system is restricted to evaporating metal films. The system is also configured with substrate rotation for added uniformity, substrate cooling, a load lock, and DC biasing for substrate pre-cleaning.