Brewer Science Spin Coater 1

Equipment Type

Spin Coater

Manufacturer

Brewer Science

Model

Cee Model 200cbx

Location

Lithography Bay

The Brewer Science Cee stand-alone spin coater / hotplate is dedicated for the spinning of electron beam resists. The tool is capable of spin coating substrates up to 7” square or 200-mm round and features high torque for maximum ramping capability.  You can also spin coat smaller size substrates (<1-cm through 200-mm) using a wide array of spin-coating chuck sizes. The precision hotplate has a temperature range from ambient to 300˚C with resolution of +/- 0.1˚C and uniformity of 0.3% across the working surface.

Specifications

0.1-second resolution for step times
Spin speed: 0 to 12,000 rpm
Spin speed acceleration:
• 0 to 30,000 rpm/s unloaded
• 0 to 23,000 rpm/s 200-mm substrate
• 0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck

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