Brewer Science Spin Coater 2 & 3

Equipment Type

Spin Coater

Manufacturer

Brewer Science

Model

Cee Model 200x-F

Location

Lithography Bay

Two additional Brewer Cee spin coaters are located in the fume hoods in the lithography bay. Spin coater # 2 is dedicated for photoresist processing, and spin coater # 3 is dedicated to all other non-standard materials, such as spin-on glasses, PVA, PPC, charge spreading layers for e-beam, and 3D laser lithography resists. The tools are capable of spin coating substrates up to 7” square or 200-mm round and features high torque for maximum ramping capability.  You can also spin coat smaller size substrates (<1-cm through 200-mm) using a wide array of spin-coating chuck sizes.

Specifications

0.1-second resolution for step times
Spin speed: 0 to 12,000 rpm
Spin speed acceleration:
• 0 to 30,000 rpm/s unloaded
• 0 to 23,000 rpm/s 200-mm substrate
• 0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck