EVG Mask Aligner

Equipment Type

Mask Aligner System (Double Side)

Manufacturer

EV Group

Model

EVG620

Location

Lithography Bay

The EVG620 is a mask aligner equipped with high-resolution top and/or bottom side microscopes for single or double-side photolithography. An ultra-soft wedge compensation together with a computer controlled contact force between the mask and wafer ensures that both yield and mask lifetime are dramatically increased. The system safely handles thick, bowed or small diameter wafers. The EVG620 superior alignment stage design achieves highly accurate alignment and exposure results while maintaining high throughput. The system is configured with the NanoAlign Technology Package, increasing EVG620 aligner microscope resolution by a factor of approximately 2.

Specifications

Wafer sizes: 100mm, 150mm, and small chips
Wafer thickness: 0.1-100mm
Separation distances: 0-300_m
Exposure modes: hard-, soft-, and vacuum contact, proximity
Mask sizes: 5”x5” and 7”x7”

evg-mask-aligner