Filmetrics

Equipment Type

Thin Film Analyzer

Manufacturer

Filmetrics

Model

F20

Location

Plasma Bay

The Filmetrics F20 is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin films. Measured films must be optically smooth and between 100Å and 50_m thick. Commonly measured films include semiconductor process films such as oxides, nitrides, resists and polysilicon. Films that cannot be measured include very rough films and opaque films.  The Filmetrics thin film analyzer is very useful for rapidly fine-tuning resist recipes and measuring etch rates.

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