J.A. Woollam V-Vase Ellipsometer

Equipment Type

Spectroscopic Ellipsometer


J.A. Woolam Co., Inc.




Metrology Bay

The Woollam V-VASE is a Variable Angle Spectroscopic Ellipsometer capable of automated thin-film characterization, high-precision angle, and a wide spectral range (240 nm to 2500 nm). Analysis of ellipsometric data can be used to determine layer thickness, surface and interfacial roughness, sample anisotropy, Mueller-matrix data, and optical constants (refractive index and extinction).The tool has a vertical sample vacuum mount that can accommodate up to 200 mm diameter samples.

The V-VASE is configured with an automated z-translation stage and digital camera for spot location viewing. Focusing optics and provide the ability to reduce the beam spot size down to 100 or 200 _m, depending on fiber choice. A heating stage is also available for samples up to 50 mm in diameter and 7.6 mm-thick with temperatures ranging from room temperature to 300_C.