Air Control Microvoid Hotplate Tower

Equipment Type

Hotplate Tower

Manufacturer

Reynolds Tech

Model

Custom Made

Location

Lithography Bay

The hot plate tower is a vented tower that holds several dedicated hotplates for pre and post baking photo resists. In addition, two Blue M Ovens for soft and hard baking of photoresists as well as post coat baking of spin on dopants and spin on glass are also available in the lithography bay.

hotplate-tower